LOW LOSS TRAVELLING WAVE PARAMETRIC DEVICES USING PLANAR CAPACITORS

LOW LOSS TRAVELLING WAVE PARAMETRIC DEVICES USING PLANAR CAPACITORS

A method of manufacturing a travelling wave parametric amplifier (TWPA) includes forming a superconducting junction on a substrate. Trenches are etched away through a metal surface and into a layer of dielectric material. The trenches define a plurality of fingers positioned in an interdigitated arr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Turner Schonenberg, Kathryn, Gibson, Gerald W, Cairns, Shayne, Mancini, Corrado P, Selvanayagam, Michael Karunendra, Lokken-Toyli, David
Format: Patent
Sprache:eng
Schlagworte:
AMPLIFIERS
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
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Beschreibung
Zusammenfassung:A method of manufacturing a travelling wave parametric amplifier (TWPA) includes forming a superconducting junction on a substrate. Trenches are etched away through a metal surface and into a layer of dielectric material. The trenches define a plurality of fingers positioned in an interdigitated arrangement of capacitors defined by a metal and a dielectric material that remains from the etched away metal surface and the layer of dielectric material.