SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

According to the present disclosure, there is provided a technique capable of rapidly identifying a cause of an occurrence of a failure and supporting a recovery. There is provided a technique that includes: a memory storing recipes, apparatus information reported from within the substrate processing apparatus and failure information; a process vessel in which a substrate is processed based on a recipe; and a controller for: (i) storing failure data in the memory together with an occurrence time of the failure contained in the failure information when the failure occurs in the substrate processing apparatus, the failure data containing first apparatus-related information reported before the failure during a first period defined in advance and the recipe in the memory; and (ii) adding second apparatus-related information reported after the failure during a second period defined in advance to the failure data.