SEMICONDUCTOR STRUCTURE AND FORMING METHOD THEREFOR, AND MEMORY

A semiconductor structure includes a substrate and a word line structure. The substrate includes an array region and a peripheral region. The word line structure includes a first conductive layer disposed on the substrate, and the first conductive layer penetrates the array region and extends to the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lin, Chih-Cheng, LI, Ran, Duan, Leilei, Zang, Biao
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!