WAVE GUIDE FILTER FOR SEMICONDUCTOR IMAGING DEVICES

In some embodiments, an image sensor is provided. The image sensor includes a photodetector disposed in a semiconductor substrate. A wave guide filter having a substantially planar upper surface is disposed over the photodetector. The wave guide filter includes a light filter disposed in a light fil...

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Bibliographische Detailangaben
Hauptverfasser: Huang, Cheng Yu, Chou, Keng-Yu, Tseng, Chien-Hsien, Wu, Wen-Hau, Chang, Chih-Kung, Hashimoto, Kazuaki, Yu, Wen-Chien, Chang, Ting-Cheng, Chuang, Chun-Hao, Chiang, Wei-Chieh
Format: Patent
Sprache:eng
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Zusammenfassung:In some embodiments, an image sensor is provided. The image sensor includes a photodetector disposed in a semiconductor substrate. A wave guide filter having a substantially planar upper surface is disposed over the photodetector. The wave guide filter includes a light filter disposed in a light filter grid structure. The light filter includes a first material that is translucent and has a first refractive index. The light filter grid structure includes a second material that is translucent and has a second refractive index less than the first refractive index.