ULTRASOUND DEVICE, IMPEDANCE MATCHING LAYER, AND ELECTROSTATIC DRIVE DEVICE
An ultrasonic device is provided for transmitting ultrasonic waves. The ultrasonic device comprises an electrostatic drive device and an impedance matching layer. The electrostatic drive device includes a first electrode and a second electrode. The first electrode is a drive membrane and is disposed...
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Zusammenfassung: | An ultrasonic device is provided for transmitting ultrasonic waves. The ultrasonic device comprises an electrostatic drive device and an impedance matching layer. The electrostatic drive device includes a first electrode and a second electrode. The first electrode is a drive membrane and is disposed with tension applied at a position facing the second electrode. The second electrode has a through hole. At least one of the first electrode and the second electrode is a laminated membrane in which a plurality of materials with different conductivities are laminated. The impedance matching layer includes a matching membrane and gas. The matching membrane has a resonance loss equal to or less than transmitted acoustic power, and is disposed with tension applied at a position facing the first electrode. The gas is sealed between the matching membrane and the first electrode. |
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