MOTORIZED HINGE LIFT FOR PVD CHAMBERS

This disclosure relates to motorized hinge-lift system designed for integration and use with physical vapor deposition (PVD) chambers, enabling efficient and precise control of the chamber's lid assembly. PVD technology plays a critical role in thin film deposition processes for various industr...

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Bibliographische Detailangaben
Hauptverfasser:	Ickes, Timothy H, Lewis, Christopher William
Format:	Patent
Sprache:	eng
Schlagworte:	CHECKS FOR WINGS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION DIFFUSION TREATMENT OF METALLIC MATERIAL FIXED CONSTRUCTIONS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL KEYS LOCKS METALLURGY SAFES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WINDOW OR DOOR FITTINGS WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THEFUNCTIONING OF THE WING
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Beschreibung
Zusammenfassung:	This disclosure relates to motorized hinge-lift system designed for integration and use with physical vapor deposition (PVD) chambers, enabling efficient and precise control of the chamber's lid assembly. PVD technology plays a critical role in thin film deposition processes for various industries, including semiconductor manufacturing, optical coatings, and advanced materials research. The proposed motorized hinge-lift systems contemplated and discussed herein significantly enhances the functionality and performance of PVD chambers by addressing key challenges associated with their operation. Among other related benefits, embodiments of such motorized hinge-lift system may provide for simple retrofitting of existent PVD chambers, and may allow seamless and reliable lid lifting and lid lowering operations, thereby minimizing the risk of operator injury or damage to sensitive substrates within the chamber or to the PVD chamber itself.