Vertical Cavity Surface Emitting Laser, Electronic Device with Same and Manufacturing Method for Same

Vertical Cavity Surface Emitting Laser, Electronic Device with Same and Manufacturing Method for Same

The present disclosure provides a vertical cavity surface emitting laser, an electronic device with the same, and a manufacturing method for the same. The vertical cavity surface emitting laser includes a substrate layer, a first electrode layer, a first reflector layer, an active layer, an oxide la...

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Hauptverfasser: WANG, Jiaxing, LIU, Qinpei
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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creator WANG, Jiaxing
LIU, Qinpei
description The present disclosure provides a vertical cavity surface emitting laser, an electronic device with the same, and a manufacturing method for the same. The vertical cavity surface emitting laser includes a substrate layer, a first electrode layer, a first reflector layer, an active layer, an oxide layer, a second reflector layer, a second electrode layer, and a passivation layer, wherein the oxide layer includes a wedge-shaped structure on which an oxide aperture is formed, and the thickness of the center of the wedge-shaped structure is smaller than the thickness of its outer sides. The vertical cavity surface emitting laser provided by the present disclosure can play roles in reducing the photon scattering loss, reducing the parasitic capacitance, and increasing the modulation bandwidth of the laser.
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subjects BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
title Vertical Cavity Surface Emitting Laser, Electronic Device with Same and Manufacturing Method for Same
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