Vertical Cavity Surface Emitting Laser, Electronic Device with Same and Manufacturing Method for Same

The present disclosure provides a vertical cavity surface emitting laser, an electronic device with the same, and a manufacturing method for the same. The vertical cavity surface emitting laser includes a substrate layer, a first electrode layer, a first reflector layer, an active layer, an oxide la...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG, Jiaxing, LIU, Qinpei
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure provides a vertical cavity surface emitting laser, an electronic device with the same, and a manufacturing method for the same. The vertical cavity surface emitting laser includes a substrate layer, a first electrode layer, a first reflector layer, an active layer, an oxide layer, a second reflector layer, a second electrode layer, and a passivation layer, wherein the oxide layer includes a wedge-shaped structure on which an oxide aperture is formed, and the thickness of the center of the wedge-shaped structure is smaller than the thickness of its outer sides. The vertical cavity surface emitting laser provided by the present disclosure can play roles in reducing the photon scattering loss, reducing the parasitic capacitance, and increasing the modulation bandwidth of the laser.