OPTICAL PHASED ARRAY DEVICE AND METHOD OF MANUFACTURE

An optical phased array device and method for manufacturing an optical phased array for the optical phased array device. The method includes: forming a base layer of a waveguide array on a base substrate, determining a waveguide pattern defining a plurality of waveguide paths, and fabricating a patt...

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Hauptverfasser: WU, Dachuan, ZHUANG, Yating, Yi, YaSha
Format: Patent
Sprache:eng
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Zusammenfassung:An optical phased array device and method for manufacturing an optical phased array for the optical phased array device. The method includes: forming a base layer of a waveguide array on a base substrate, determining a waveguide pattern defining a plurality of waveguide paths, and fabricating a pattern layer of the waveguide array on top of the base layer of the waveguide array according to the determined waveguide pattern. The plurality of waveguide paths branch from a common path and terminate at a plurality of edge emitters, where the plurality of edge emitters are spaced apart from one another along a first axis that extends in the first dimension along an edge of the optical phased array. The spacing of multiple ones of the plurality of emitters along the first axis is aperiodic.