PROBE CARD, METHOD FOR DESIGNING PROBE CARD, METHOD FOR PRODUCING TESTED SEMICONDUCTOR DEVICE METHOD FOR TESTING UNPACKAGED SEMICONDUCTOR BY PROBE CARD, DEVICE UNDER TEST AND PROBE SYSTEM

PROBE CARD, METHOD FOR DESIGNING PROBE CARD, METHOD FOR PRODUCING TESTED SEMICONDUCTOR DEVICE METHOD FOR TESTING UNPACKAGED SEMICONDUCTOR BY PROBE CARD, DEVICE UNDER TEST AND PROBE SYSTEM

A probe card, a method for designing the probe card, a method for producing a tested semiconductor device, a method for testing an unpackaged semiconductor by the probe card, a device under test, and a probe system are provided. The probe card includes a wiring substrate, a connection carrier board,...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Chen, Yu-Hao, Cheng, Yang-Hung, Wei, Hao, Lyu, Jhin-Ying
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A probe card, a method for designing the probe card, a method for producing a tested semiconductor device, a method for testing an unpackaged semiconductor by the probe card, a device under test, and a probe system are provided. The probe card includes a wiring substrate, a connection carrier board, and a probe device. At least two probes form a differential pair electrically connected to a loopback line of the connection carrier board to form a test signal loopback path. The probe device has a probe device impedance on the test signal loopback path. The loopback line has a loopback line impedance on the test signal loopback path. A difference between the probe device impedance on the test signal loopback path and the loopback line impedance on the test signal loopback path is in an impedance range.