SAMPLE ANALYSIS APPARATUS AND SAMPLE ANALYSIS METHOD USING THE SAME

A sample analysis apparatus includes a first chamber that performs a first heating process for heating a small sample and a second chamber including a second chamber housing in which a second heating process for heating a wafer sample is performed. The first chamber includes a first chamber housing...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Go, Seonhwa, Lim, Jiyun, Shin, Sangyoon, Kim, Younghye
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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