SAMPLE ANALYSIS APPARATUS AND SAMPLE ANALYSIS METHOD USING THE SAME

A sample analysis apparatus includes a first chamber that performs a first heating process for heating a small sample and a second chamber including a second chamber housing in which a second heating process for heating a wafer sample is performed. The first chamber includes a first chamber housing...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Go, Seonhwa, Lim, Jiyun, Shin, Sangyoon, Kim, Younghye
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A sample analysis apparatus includes a first chamber that performs a first heating process for heating a small sample and a second chamber including a second chamber housing in which a second heating process for heating a wafer sample is performed. The first chamber includes a first chamber housing in which the first heating process is performed, a first support that supports the small sample, a first heating device that heats the small sample, an accommodation housing in which the small sample is accommodated, a sample tray arranged in the accommodation space, sample container configured to store the small sample, and a transfer module configured to transfer the sample container and the small sample from the accommodation housing to the first chamber.