MEMORY DEVICE INCLUDING STAIRCASE STRUCTURES AND ADJACENT TRENCH STRUCTURES

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another; a first staircase structure formed in the tiers; a second staircase structure formed in the tiers adjacent the first staircase structure, respective portions o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jain, Harsh Narendrakumar, Zeng, Qinglin, Housley, Richard T, Light, Scott L, Chess, Jordan, Kumara Vadivel, Shruthi, Yuan, Hsiao-Kuan, Zhang, Xiaosong, Han, Zhenxing
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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