MEMORY DEVICE INCLUDING STAIRCASE STRUCTURES AND ADJACENT TRENCH STRUCTURES

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another; a first staircase structure formed in the tiers; a second staircase structure formed in the tiers adjacent the first staircase structure, respective portions o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jain, Harsh Narendrakumar, Zeng, Qinglin, Housley, Richard T, Light, Scott L, Chess, Jordan, Kumara Vadivel, Shruthi, Yuan, Hsiao-Kuan, Zhang, Xiaosong, Han, Zhenxing
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another; a first staircase structure formed in the tiers; a second staircase structure formed in the tiers adjacent the first staircase structure, respective portions of conductive materials in the tiers forming a part of the first and second staircase structure and a part of respective control gates associated with memory cells; a first trench structure formed in the tiers adjacent the first staircase structure and the second staircase structure, the first trench structure including length in a direction from the first staircase structure to the second staircase structure; and a second trench structure formed in the tiers adjacent the first trench structure, the second trench structure including a length in the direction from the first staircase structure to the second staircase structure.