FOLDED STAIRCASE VIA ROUTING FOR MEMORY

Methods, systems, and devices for folded staircase via routing for memory are described. For instance, a memory device may include a set of word lines extending in first direction. Additionally, the memory device may include a first via, a second via, and a third via in a trench that extends through...

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Bibliographische Detailangaben
Hauptverfasser: Xu, Lifang, Luo, Shuangqiang
Format: Patent
Sprache:eng
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Zusammenfassung:Methods, systems, and devices for folded staircase via routing for memory are described. For instance, a memory device may include a set of word lines extending in first direction. Additionally, the memory device may include a first via, a second via, and a third via in a trench that extends through at least a portion of the set of word lines The first via, the second via, and the third via may extend in a second direction different than the first, where the second via is between the first via and the third via along the first direction, and where the second via is coupled with a word line of the set of word lines. Additionally, the first via and the third via may be electrically isolated from the word line of the set of word lines.