SEMICONDUCTOR ISOLATION DEVICE AND METHOD

SEMICONDUCTOR ISOLATION DEVICE AND METHOD

Apparatus and methods are disclosed, including transistors, semiconductor devices and systems with isolation structures. Example semiconductor devices and methods include isolation structures with tapered sidewalls that intersect along a line at a trench bottom. Example semiconductor devices and met...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Smith, Michael Andrew
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Apparatus and methods are disclosed, including transistors, semiconductor devices and systems with isolation structures. Example semiconductor devices and methods include isolation structures with tapered sidewalls that intersect along a line at a trench bottom. Example semiconductor devices and methods are shown with different isolation structures in peripheral circuitry compared to isolation structures in a memory array.