MULTILAYER PIEZOELECTRIC SUBSTRATE PACKAGING

A surface acoustic wave filter package includes a cavity formed in or above a substrate and one or more surface acoustic wave filters formed on the substrate. The surface acoustic wave filter package includes a cavity roof including a filler material and having a low coefficient of thermal expansion...

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Bibliographische Detailangaben
Hauptverfasser: Goto, Rei, Fukuhara, Hironori
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A surface acoustic wave filter package includes a cavity formed in or above a substrate and one or more surface acoustic wave filters formed on the substrate. The surface acoustic wave filter package includes a cavity roof including a filler material and having a low coefficient of thermal expansion.