WAFER SIGNAL AND POWER ARRANGEMENT FOR NANOSHEET DEVICES

A semiconductor device includes an integrated circuit chip having a frontside and a backside. The frontside includes a frontside signal line configured to transmit signals to a first terminal of a transistor arranged in the integrated circuit chip, and the backside includes a backside power line con...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Clevenger, Lawrence A, Xie, Ruilong, Yang, Chih-Chao, Li, Tao
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor device includes an integrated circuit chip having a frontside and a backside. The frontside includes a frontside signal line configured to transmit signals to a first terminal of a transistor arranged in the integrated circuit chip, and the backside includes a backside power line configured to transmit power to a second terminal of the transistor. The semiconductor device further includes a contact configured to connect a gate of the transistor to a backside signal line configured to transmit signals to the gate of the transistor. The semiconductor device further includes a via extending through the frontside and the backside of the integrated circuit chip. The via is configured to transmit signals between a lowermost contact on the frontside and an uppermost contact on the backside of the integrated circuit chip.