ROBOT AND TEACHING METHOD

A horizontally articulated robot includes a manipulator, a hand, and a teaching member. The hand is connected to the manipulator. The hand is capable of holding a substrate. The teaching member is connected to the manipulator. The teaching member is not used for transferring a substrate.

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Bibliographische Detailangaben
Hauptverfasser:	MATSUOKA, Junichi, NAKAYA, Atsushi, KANEZAKI, Kazuma
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS TRANSPORTING
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Beschreibung
Zusammenfassung:	A horizontally articulated robot includes a manipulator, a hand, and a teaching member. The hand is connected to the manipulator. The hand is capable of holding a substrate. The teaching member is connected to the manipulator. The teaching member is not used for transferring a substrate.