ACTUATOR DEVICE MANUFACTURING METHOD

An actuator device manufacturing method includes: a preparation step of preparing an actuator device including a support portion, a movable portion, a connection portion, and a metal member disposed such that a stress acts on the metal member when the movable portion oscillates; an oscillation step...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	IIMA, Atsuya, WARASHINA, Yoshihisa, SUZUKI, Daiki, SAKAKIBARA, Yasuyuki
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An actuator device manufacturing method includes: a preparation step of preparing an actuator device including a support portion, a movable portion, a connection portion, and a metal member disposed such that a stress acts on the metal member when the movable portion oscillates; an oscillation step of oscillating the movable portion for a predetermined time; an acquisition step of acquiring a parameter related to a viscous resistance in a vibration of the movable portion; and a determination step of determining that the actuator device is qualified, when a difference between the parameter acquired in the acquisition step and a reference value corresponding to the parameter at a start of the oscillation step is a predetermined value or more in a direction in which the viscous resistance decreases, and determining that the actuator device is disqualified, when the difference is less than the predetermined value.