IMAGE SENSOR GRID AND METHOD OF FABRICATION OF SAME

IMAGE SENSOR GRID AND METHOD OF FABRICATION OF SAME

An image sensor includes a substrate, a grid, and a color filter. The grid is over the substrate. From a cross-sectional view, the grid includes a first grid and a second grid over the first grid, the first grid has lower portion that has a first sidewall and a second sidewall opposing the first sid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIAO, Keng-Ying, CHEN, Po-Zen, TUNG, Huai-Jen, CHEN, Hsien-Li, LIN, Chin-Yu, YEH, Su-Yu
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An image sensor includes a substrate, a grid, and a color filter. The grid is over the substrate. From a cross-sectional view, the grid includes a first grid and a second grid over the first grid, the first grid has lower portion that has a first sidewall and a second sidewall opposing the first sidewall, the second grid has a third sidewall and a fourth sidewall opposing the third sidewall, and a width between the third sidewall and the fourth sidewall is less than a width between the first sidewall and the second sidewall. The color filter extends through the grid structure.