INSPECTION APPARATUS, INSPECTION METHOD, AND STORAGE MEDIUM

An inspection apparatus includes processing circuitry. The processing circuitry is configured to: acquire a first image and a second image for inspecting an inspection target; generate a plurality of deformed images by applying a plurality of deformation processes to at least one of the first image or the second image; calculate, for each pixel, a difference value between a pixel value of the first image and a pixel value of the second image, using the deformed images; calculate a pixel-by-pixel integrated difference value by integrating a plurality of difference values calculated for the respective deformed images; and detect an anomaly of the inspection target based on the pixel-by-pixel integrated difference value.