DEEP TRENCH CAPACITORS (DTCs) EMPLOYING BYPASS METAL TRACE SIGNAL ROUTING, AND RELATED INTEGRATED CIRCUIT (IC) PACKAGES AND FABRICATION METHODS

Deep trench capacitors (DTCs) employing bypass metal trace signal routing supporting signal bypass routing, and related integrated circuit (IC) packages and fabrication methods are disclosed. The DTC includes an outer metallization layer (e.g., a redistribution layer (RDL)) to provide an external in...

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Bibliographische Detailangaben
Hauptverfasser: Buot, Joan Rey Villarba, We, Hong Bok, Patil, Aniket
Format: Patent
Sprache:eng
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Zusammenfassung:Deep trench capacitors (DTCs) employing bypass metal trace signal routing supporting signal bypass routing, and related integrated circuit (IC) packages and fabrication methods are disclosed. The DTC includes an outer metallization layer (e.g., a redistribution layer (RDL)) to provide an external interface to the DTC. In exemplary aspects, to make available signal routes that can extend through a DTC, an outer metallization layer of the DTC includes additional metal interconnects. These additional metal interconnects are not coupled the capacitors in the DTC. These additional metal interconnects are interconnected to each other by metal traces (e.g., metal lines) in the outer metallization layer of the DTC to provide bypass signal routes through the DTC. This is opposed to signal paths in a package substrate in which the DTC is coupled or embedded having to be routed around the DTC in the package substrate.