METHOD AND SYSTEM FOR DETECTING SEMICONDUCTOR DEVICE

METHOD AND SYSTEM FOR DETECTING SEMICONDUCTOR DEVICE

A method and a system for detecting a semiconductor device are provided. The method comprises obtaining an image of the semiconductor device, evaluating a feature of the image, detecting a defect of the semiconductor device based on the feature, extracting a defect information for the defect, calcul...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN, HSIANG-FU, TAI, WENUAN, LIEN, KANG-YI, HU, FAN, WEI, TZUIEH, HUANG, IIEH
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method and a system for detecting a semiconductor device are provided. The method comprises obtaining an image of the semiconductor device, evaluating a feature of the image, detecting a defect of the semiconductor device based on the feature, extracting a defect information for the defect, calculating a defect die ratio (DDR) in response to the defect and analyzing a relation between the DDR and the defect information.