METHOD FOR MITIGATING WARPAGE ON STACKED WAFERS

METHOD FOR MITIGATING WARPAGE ON STACKED WAFERS

Methods for mitigating warpage on stacked wafers are provided herein. In one example, a method for mitigating warpage on stacked wafers includes depositing a first warpage compensating layer on a backside of a first wafer, stacking an active side of the first wafer on an active side of a second wafe...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KIM, Myongseob, CHANG, Cheang-whang, LIU, Henley
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Methods for mitigating warpage on stacked wafers are provided herein. In one example, a method for mitigating warpage on stacked wafers includes depositing a first warpage compensating layer on a backside of a first wafer, stacking an active side of the first wafer on an active side of a second wafer to form a wafer stack having circuitry of the first wafer electrically connected to circuitry of the second wafer, and removing the first warpage compensating layer from the backside of the first wafer prior dicing the wafer stack.