MULTI-PIECE SLIT VALVE GATE

Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a seal...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Vo, Hannie Thi, Amir, Ofer, Reimer, Peter, Le, Shawn Thanhson
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The slit valve gate further includes a clamp portion coupled to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.