DRIVE ELEMENT

A drive element includes: a fixing part; a drive part placed on a lateral side of the fixing part and coupled to the fixing part; and a movable part configured to be driven by the drive part. A lower electrode, a piezoelectric layer, and an upper electrode are formed in order in an upper surface reg...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TAKAYAMA, Ryouichi, KATAYAMA, Takuma, OKAMOTO, Shoji
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION
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Beschreibung
Zusammenfassung:	A drive element includes: a fixing part; a drive part placed on a lateral side of the fixing part and coupled to the fixing part; and a movable part configured to be driven by the drive part. A lower electrode, a piezoelectric layer, and an upper electrode are formed in order in an upper surface region of the fixing part and the drive part, and in a wiring region on the fixing part side of the upper surface region, a low dielectric layer containing at least one element forming the piezoelectric layer is formed on an upper surface of the piezoelectric layer.