NON-VOLATILE MEMORY DEVICE
A non-volatile memory device includes: a substrate; a gate structure including a plurality of gate electrode layers and a plurality of interlayer insulating layers, which are alternately stacked in a vertical direction on the substrate, the gate structure including a hole pattern; a data storage lay...
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Zusammenfassung: | A non-volatile memory device includes: a substrate; a gate structure including a plurality of gate electrode layers and a plurality of interlayer insulating layers, which are alternately stacked in a vertical direction on the substrate, the gate structure including a hole pattern; a data storage layer disposed inside the hole pattern; and a channel layer disposed on the data storage layer inside the hole pattern. The channel layer is disposed at each of different levels isolated from each other in the vertical direction by the plurality of interlayer insulating layers. |
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