EXTRACTION GRID
A device for extracting ions and/or electrons from a plasma has a grid (1) and a grid holder (2), on the circumference of which the grid (1) is fastened. According to the invention, the grid (1) is configured as an expanded metal grid. The invention further also provides a plasma source, a plasma co...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A device for extracting ions and/or electrons from a plasma has a grid (1) and a grid holder (2), on the circumference of which the grid (1) is fastened. According to the invention, the grid (1) is configured as an expanded metal grid. The invention further also provides a plasma source, a plasma coating device, and a method for producing an interference layer or interference layer systems. |
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