MEASUREMENT METHOD

A measurement method includes a step of measuring an object to be measured and a reference object by a first measurement unit and a second measurement unit. The first measurement unit has a first displacement meter and a second displacement meter that face each other in a first direction and measure...

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Bibliographische Detailangaben
Hauptverfasser:	URAKAMI, Taichi, UMEHARA, Masakazu, KISHIMOTO, Naoya, IWATA, Kazutoshi, HORIBA, Keito, ISHIZU, Seiji
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A measurement method includes a step of measuring an object to be measured and a reference object by a first measurement unit and a second measurement unit. The first measurement unit has a first displacement meter and a second displacement meter that face each other in a first direction and measure the distance from the object to be measured. The second measurement unit has a third displacement meter and a fourth displacement meter that face each other in the first direction and measure the distance from the reference object. A frame-like supporting member includes a first frame portion supporting the first displacement meter and the third displacement meter, a second frame portion supporting the second displacement meter and the fourth displacement meter, and a third frame portion and a fourth frame portion that connect both end portions of the first frame portion and the second frame portion to each other.