NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME

A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulati...

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Bibliographische Detailangaben
Hauptverfasser: AOCHI, Hideaki, TANAKA, Hiroyasu, MATSUNAMI, Junya, FUKUZUMI, Yoshiaki, KIDOH, Masaru, KATSUMATA, Ryota, FUJIWARA, Tomoko, MIKAJIRI, Yoshimasa, ISHIDUKI, Megumi, OOTA, Shigeto, KIRISAWA, Ryouhei, KITO, Masaru, KOMORI, Yosuke
Format: Patent
Sprache:eng
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Zusammenfassung:A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit.