SYSTEM AND METHOD FOR DETERMINING DEFECT REGIONS OF PRODUCTS IN A MANUFACTURING PROCESS

A computer-implemented method for determining defect regions of products in a manufacturing process, is disclosed. The computer-implemented method includes steps of: obtaining experimental data from a machine; (b) obtaining first geometry data associated with historical products; (c) computing first geometrical parameters, based on the first geometry data associated with the historical products, by a geometry model; (d) computing second geometrical parameters, based on second geometry data associated with new products, by the geometry model; and (e) determining the defect regions in the new and historical products, based on the computed statistical features associated with defect types and locations, and the first and second geometrical parameters, by a machine learning model. The machine learning model is configured to determine the optimized recipe parameter to reduce the defect in at least one of: the new products and the historical products.