COMPOSITE SUBSTRATE, SURFACE ACOUSTIC WAVE DEVICE, AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE

COMPOSITE SUBSTRATE, SURFACE ACOUSTIC WAVE DEVICE, AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE

A method for manufacturing a composite substrate includes: forming a first intermediate layer including thermally synthesized silica on a surface of a support substrate; forming a second intermediate layer including an inorganic material on a surface of a piezoelectric single crystal substrate; flat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: AKIYAMA, Shoji, TANNO, Masayuki
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Beschreibung
Zusammenfassung:A method for manufacturing a composite substrate includes: forming a first intermediate layer including thermally synthesized silica on a surface of a support substrate; forming a second intermediate layer including an inorganic material on a surface of a piezoelectric single crystal substrate; flattening a surface of the second intermediate layer; and bonding a surface of the first intermediate layer to the flattened surface of the second intermediate layer.