APPARATUS AND METHOD FOR MEASURING DISTANT TO AND/OR VELOCITY OF PHYSICAL OBJECT
A measurement apparatus includes a light source that emits frequency-modulated light, an interference optical system that separates the light into reference light and output light and generates interfering light, a photodetector that receives the interfering light and outputs a detection signal corr...
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Zusammenfassung: | A measurement apparatus includes a light source that emits frequency-modulated light, an interference optical system that separates the light into reference light and output light and generates interfering light, a photodetector that receives the interfering light and outputs a detection signal corresponding to an intensity of the interfering light, a storage device that stores correcting data for use in correction of the detection signal, the correcting data being each associated with a corresponding one of different operating states of the light source, and a processing circuit that sends out a control signal to the light source, corrects the detection signal based on one or more pieces of correcting data selected from among the correcting data according to the operating state of the light source, and generates measurement data on a distance to and/or a velocity of a physical object based on the detection signal, and outputs the measurement data. |
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