TERAHERTZ PROBE

According to embodiments, a cantilever is provided. The cantilever includes a first conductive line, a second conductive line, and a third conductive line extending on the substrate, a microtip arranged on the substrate, and an emitter antenna arranged on the microtip, connected to the first to thir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Baek, Inkeun, Jeon, Ikseon, Park, Junbum, Nagel, Michael, Priwisch, Martin, Michalski, Alexander, Koo, Namil, Yoon, Jongmin, Park, Suhwan, Jang, Yoonkyung
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to embodiments, a cantilever is provided. The cantilever includes a first conductive line, a second conductive line, and a third conductive line extending on the substrate, a microtip arranged on the substrate, and an emitter antenna arranged on the microtip, connected to the first to third conductive lines, and configured to produce a scattering signal of a terahertz wave band, wherein the emitter antenna includes a first emitter electrode connected to the first conductive line, a second emitter electrode connected to the second conductive line and adjacent to the first emitter electrode, a third emitter electrode connected to the third conductive line and spaced apart from the first emitter electrode with the second emitter electrode in-between, and a scattering part connecting the first and second emitter electrodes with each other.