ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD FOR PRODUCING ULTRAPURE WATER

An ultrapure water production system that has a simplified configuration and that can efficiently remove fine particles that are contained in ultrapure water is provided. Ultrapure water production system has ultrapure water supply line that is connected to point of use and that supplies ultrapure w...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUDO, Fumio, KONDO, Tsukasa, ICHIHARA, Fumitaka, SUGAWARA, Hiroshi
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY METALLURGY TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!