ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD FOR PRODUCING ULTRAPURE WATER

An ultrapure water production system that has a simplified configuration and that can efficiently remove fine particles that are contained in ultrapure water is provided. Ultrapure water production system has ultrapure water supply line that is connected to point of use and that supplies ultrapure water to point of use; return line that returns the ultrapure water that has not been used at point of use to ultrapure water supply line; and at least one ion exchange apparatus that is provided on ultrapure water supply line. Space velocity of water to be treated that flows in final-stage ion exchange apparatus is 170 (1/hr) or more, and wherein final-stage ion exchange apparatus is an ion exchange apparatus that is closest to point of use from among at least one ion exchange apparatus.