DEVICE AND METHOD FOR HANDLING POT-SHAPED HOLLOW BODIES, MORE PARTICULARLY TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR EUV LITHOGRAPHY MASKS

A device for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for EUV lithography masks includes a wall, which encloses an inner space, a gripping and moving apparatus arranged in an inner space for moving the hollow body within the inner space an...

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Bibliographische Detailangaben

Hauptverfasser:	HAAS, Gunter, SCHIENLE, Frank, GUTEKUNST, Jürgen
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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