DEVICE AND METHOD FOR HANDLING POT-SHAPED HOLLOW BODIES, MORE PARTICULARLY TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR EUV LITHOGRAPHY MASKS

DEVICE AND METHOD FOR HANDLING POT-SHAPED HOLLOW BODIES, MORE PARTICULARLY TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR EUV LITHOGRAPHY MASKS

A device for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for EUV lithography masks includes a wall, which encloses an inner space, a gripping and moving apparatus arranged in an inner space for moving the hollow body within the inner space an...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HAAS, Gunter, SCHIENLE, Frank, GUTEKUNST, Jürgen
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A device for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for EUV lithography masks includes a wall, which encloses an inner space, a gripping and moving apparatus arranged in an inner space for moving the hollow body within the inner space and a wall opening which is formed by the wall, can be closed by a closure body and through which the inner space is accessible. The device includes a lid handling unit which can be detachably connected to the lid. The lid can be connected to the lid handling unit and is separated from the hollow body.