BRIDGE APPARATUS AND METHOD FOR SEMICONDUCTOR DIE TRANSFER
An apparatus for transferring a semiconductor die ("die") from the first substrate to the second substrate. The apparatus includes a stage configured to hold a product substrate. A bridge holds a transfer mechanism assembly and a die substrate holder configured to hold the first substrate....
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An apparatus for transferring a semiconductor die ("die") from the first substrate to the second substrate. The apparatus includes a stage configured to hold a product substrate. A bridge holds a transfer mechanism assembly and a die substrate holder configured to hold the first substrate. A controller is configured to cause the bridge and the transfer mechanism assembly and the die substrate holder to move to align the transfer mechanism assembly with the die on the first substrate with a transfer position on the second substrate where the die is to be transferred. |
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