ARBITRARY ELECTRON DOSE WAVEFORMS FOR ELECTRON MICROSCOPY

ARBITRARY ELECTRON DOSE WAVEFORMS FOR ELECTRON MICROSCOPY

A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modul...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK, Sang Tae, MASIEL, Daniel Joseph, BLOOM, Ruth Shewmon, REED, Bryan Walter
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.