SILOXANE MITIGATION FOR LASER SYSTEMS

SILOXANE MITIGATION FOR LASER SYSTEMS

In various embodiments, the concentration and deposition of siloxane materials within components of laser systems, such as laser resonators, is reduced or minimized utilizing mitigation systems that may also supply gas having low siloxane levels into multiple different components in series or in par...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LOCHMAN, Bryan, ZHOU, Wang-Long, CHANN, Bien, VILLARREAL-SAUCEDO, Francisco
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Beschreibung
Zusammenfassung:In various embodiments, the concentration and deposition of siloxane materials within components of laser systems, such as laser resonators, is reduced or minimized utilizing mitigation systems that may also supply gas having low siloxane levels into multiple different components in series or in parallel.