METHOD FOR PRODUCING A PLANAR LIGHT CIRCUIT AND PLANAR LIGHT CIRCUIT
A method for producing a planar light circuit is specified. The method comprises: providing a substrate free of light producing regions, depositing a waveguide layer, applying a photostructurable mask on the waveguide layer, photostructuring of the photostructurable mask such that the photostructura...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method for producing a planar light circuit is specified. The method comprises: providing a substrate free of light producing regions, depositing a waveguide layer, applying a photostructurable mask on the waveguide layer, photostructuring of the photostructurable mask such that the photostructurable mask is removed in regions, etching of the waveguide layer in the regions such that channels are produced in the waveguide layer, wherein the channels confine waveguides, removal of the photostructurable mask layer, and singulating into a planar light circuit.Furthermore, a planar light circuit is specified. |
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