METHOD OF CLEANING ULTRAFILTRATION MEMBRANE MODULE AND MANAGEMENT METHOD OF ULTRAPURE WATER MANUFACTURING SYSTEM USING SAME
A method of cleaning an ultrafiltration membrane module includes installing an ultrafiltration membrane in an ultrafiltration membrane module, supplying deionized water to the ultrafiltration membrane module, and flushing the ultrafiltration membrane module with the deionized water by increasing dec...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of cleaning an ultrafiltration membrane module includes installing an ultrafiltration membrane in an ultrafiltration membrane module, supplying deionized water to the ultrafiltration membrane module, and flushing the ultrafiltration membrane module with the deionized water by increasing decreasing a flow rate of the deionized water supplied to the ultrafiltration membrane module. |
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