METHOD FOR MANUFACTURING A PRESSURE SENSOR HAVING A PRESSURE-SENSITIVE MEDIUM, AND PRESSURE SENSOR

A method for manufacturing a pressure sensor having a pressure-sensitive medium. The method includes: providing a pressure sensor having a pressure sensor element, which is arranged in a receiving space of a housing of the pressure sensor; filling the receiving space with a pressure-sensitive medium...

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Bibliographische Detailangaben
Hauptverfasser: Friedl, Joachim, Kreutzer, Joachim, Schuett, Klaus-Volker, Raedler, Michael, Sodan, Lars, Kroner, Elmar, Stihler, Patrick, Baraki, Raschid, Maul, Steven, Nonnenmacher, Dorothee, Zou, Yang, Guenter, Friedhelm
Format: Patent
Sprache:eng
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Zusammenfassung:A method for manufacturing a pressure sensor having a pressure-sensitive medium. The method includes: providing a pressure sensor having a pressure sensor element, which is arranged in a receiving space of a housing of the pressure sensor; filling the receiving space with a pressure-sensitive medium; applying a second medium, which is immiscible with the pressure-sensitive medium, to a surface of the pressure-sensitive medium; forming a membrane in a boundary region between the pressure-sensitive medium and the second medium by way of a phase-transfer reaction between a first reactant and a second reactant, at least the first reactant or the second reactant being dissolved in the pressure-sensitive medium or in the second medium. A pressure sensor manufactured by the method is also described.