FILTRATION IN A VAPOR DELIVERY SYSTEM

A filter assembly includes a fluid inlet; a fluid outlet; a conduit; and a filter. The conduit is fluidly connected to the fluid inlet and the filter. The filter is fluidly connected to the conduit and the fluid outlet. The filter assembly is configured for flowing at least one of the following flui...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Battle, Scott L, Thomas, Jacob
Format:	Patent
Sprache:	eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A filter assembly includes a fluid inlet; a fluid outlet; a conduit; and a filter. The conduit is fluidly connected to the fluid inlet and the filter. The filter is fluidly connected to the conduit and the fluid outlet. The filter assembly is configured for flowing at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. The filter is configured to collect a molybdenum residue, a tungsten residue, or any combination thereof from the fluid resulting in the filtered fluid.