CHAMBER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition...

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Bibliographische Detailangaben
Hauptverfasser:	SERCEL, Jeffrey P, FUJIMOTO, Junichi, TATSUMI, Takahiro, NAGAI, Kazuki
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.