TEMPERATURE CONTROL SYSTEM
A temperature control system includes: a circulation channel which includes a temperature adjustment target and through which a circulation fluid that adjusts a temperature of the temperature adjustment target flows; a temperature adjuster that is arranged in the circulation channel and that adjusts...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A temperature control system includes: a circulation channel which includes a temperature adjustment target and through which a circulation fluid that adjusts a temperature of the temperature adjustment target flows; a temperature adjuster that is arranged in the circulation channel and that adjusts a temperature of the circulation fluid supplied to the temperature adjustment target; a first temperature adjustment unit that is connected to the circulation channel via a first supply channel and that delivers a first fluid having a first temperature; a second temperature adjustment unit that is connected to the circulation channel via a second supply channel and that delivers a second fluid having a second temperature higher than the first temperature; a first valve arranged in the first supply channel; and a second valve arranged in the second supply channel. The second valve is an electromagnetic valve, and closes the second supply channel after opening the second supply channel when a set temperature of the temperature adjustment target is changed from a first set temperature to a second set temperature higher than the first set temperature. |
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