RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE

Reticle containers include a cover and a baseplate, with magnetic particle traps included in at least one of the cover or the baseplate. The cover and baseplate each include sealing surfaces, and at least one of the sealing surfaces includes magnetic material that can be attracted by the magnetic pa...

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Bibliographische Detailangaben
Hauptverfasser:	Raschke, Russ V, Lindgren, Lesa
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Reticle containers include a cover and a baseplate, with magnetic particle traps included in at least one of the cover or the baseplate. The cover and baseplate each include sealing surfaces, and at least one of the sealing surfaces includes magnetic material that can be attracted by the magnetic particle traps. The sealing surfaces can be selected such that particulate generated by wear at the sealing surfaces is primarily the magnetic material. The magnetic particle traps can further be configured to be cleaned by reduction of the attraction of the particulate matter to the magnetic particle traps.