PIEZOELECTRICALLY-ACTUATED RESONANT SCANNING MIRROR

Examples are disclosed that relate to scanning mirror systems for display devices. One example provides a scanning mirror system comprising a mirror portion, a flexure arm extending from the mirror portion, and a piezoelectric actuator support portion supporting a piezoelectric actuator comprising a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DAVIS, Wyatt Owen, ONG, Xiao Chuan
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Examples are disclosed that relate to scanning mirror systems for display devices. One example provides a scanning mirror system comprising a mirror portion, a flexure arm extending from the mirror portion, and a piezoelectric actuator support portion supporting a piezoelectric actuator comprising a piezoelectric film. The scanning mirror system further comprises a transmission arm extending between the flexure arm and the piezoelectric actuator support portion to transmit motion of the piezoelectric film to the flexure arm, the transmission arm separated at least partially from the piezoelectric actuator support portion by a first gap. The scanning mirror system further comprises an anchor portion separated at least partially from the piezoelectric actuator support portion by a second gap, the anchor portion configured to anchor the scanning mirror system to another structure.